Pulse Magnetron Sputtering Power Supply

The power supply is mainly used for magnetron sputtering systems.  It adopts an advanced high-frequency switching technology with excellent output characteristics and high adaptability.  The range of adjustment parameters is wide with stable current output.  It also offers high performance with proper safeguard protection, light weight, as well as small footprint. 

Main Characteristics

1. Advanced switching technology with small footprint, stable operation, and low electrical interference
2. Auto steady current function for stable operation under highly fluctuating electrical network and load
3. Multiple circuit protections enabling continuous and stable operation under high-frequency arcing without circuit damage

Main Specifications

1. Output Duty Cycle:        10 - 80 %, continuously adjustable.
2. Output Frequency:        40 kHz
3. Power Input:                 Three phases 380 V + 10 %.

Model	Power	Unload Voltage	Working Voltage	Max. Working Current	Working Mode	Cooling Mode	Cabinet Model
MSP-5	5kW	1000V	200-800V	7A	CC	Wind	7U+
MSP-10	10kW	1000V	200-800V	13A	CC	Wind	7U+
MSP-20	20kW	1000V	200-800V	25A	CC	Water	7U+
MSP-40	40kW	1000V	200-800V	50A	CC	Water	1.2m Cabinet
MSP-60	60kW	1000V	200-800V	75A	CC	Water	1.8m Cabinet
MSP-100	100kW	1000V	200-800V	125A	CC	Water	2m Cabinet

Cabinet Dimension Table

Item Number	Cabinet Model	Body Dimension (mm)	Front Panel Dimension (mm)	Front Panel Holder	Back Panel Port
1	6U	W435xH270xD560	W480xH290	50mm	100mm
2	7U	W435xH315xD550	W480xH345	50mm	100mm
3	7U+	W435xH315xD705	W480xH345	50mm	100mm

Item Number	Cabinet Model	Body Dimension (mm)	Body Dimension with Uplift Holders and Wheels (mm)	Backdoor
1	1.2m	W600xH1220xD700	W600xH1255xD700	Single Door Opening
2	1.6m	W600xH1620xD800	W600xH1720xD800	Single Door Opening
3	1.8m	W600xH1800xD800	W600xH1890xD800	Single Door Opening
4	2.0m	W600xH2060xD800	W600xH2150xD800	Single Door Opening

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