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  Power Supplies >> MS Magnetron Sputtering Power Supply >> DC Magnetron Sputtering Power Supply
 

DC Magnetron Sputtering Power Supply

       

The power supply is mainly used for magnetron sputtering systems.  It adopts an advanced high-frequency switching technology with excellent output characteristics and high adaptability.  The range of adjustment parameters is wide with stable current output.  It also offers high performance with proper safeguard protection, light weight, as well as small footprint.   

Main Characteristics

  1. Advanced switching technology with small footprint, stable operation, and low electrical interference
  2. Auto steady current function for stable operation under highly fluctuating electrical network and load
  3. Multiple circuit protections enabling continuous and stable operation under high-frequency arcing without circuit damage

 

 

Main Specifications

Power Input:                 Three phases 380 V + 10 %.

Model

Power

Unload Voltage

Working Voltage

Max. Working Current

Working Mode

Cooling Mode

Cabinet Model

MSD-5

5kW

800V

200-600V

10A

CC

Wind

6U

MSD-10

10kW

800V

200-600V

20A

CC

Wind

6U

MSD-20

20kW

800V

200-600V

40A

CC

Water

7U

MSD-40

30kW

800V

200-600V

80A

CC

Water

1.2m Cabinet

MSD-60

60kW

800V

200-600V

120A

CC

Water

1.6m Cabinet

MSD-100

100kW

800V

200-600V

200A

CC

Water

2m Cabinet

CC: Constant Current;

Optional: Remote control by PLC

Cabinet Dimension Table

Item Number

Cabinet Model

Body Dimension (mm)

Front Panel Dimension (mm)

Front Panel Holder

Back Panel Port

1

6U

W435xH270xD560

W480xH290

50mm

100mm

2

7U

W435xH315xD550

W480xH345

50mm

100mm

3

7U+

W435xH315xD705

W480xH345

50mm

100mm

Item Number

Cabinet Model

Body Dimension (mm)

Body Dimension with Uplift Holders and Wheels (mm)

Backdoor

1

1.2m

W600xH1220xD700

W600xH1255xD700

Single Door Opening

2

1.6m

W600xH1620xD800

W600xH1720xD800

Single Door Opening

3

1.8m

W600xH1800xD800

W600xH1890xD800

Single Door Opening

4

2.0m

W600xH2060xD800

W600xH2150xD800

Single Door Opening

 

Related Links

Pulse magnetron power supply

Medium Frequency bipolar magnetron power supply

Bias power supply

Micro-arc oxidation power supply

 

 

 

 

 

 

 

 

 

  Hits:54  Input time:9/18/2022 【Print】 【Back
   
 
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