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  Power Supplies >> BP Series Biased Power Inverter >> Pulse Bias Power Supply
 

Pulse Bias Power Supply

The power supply boasts an advanced switching technology offering a low footprint, stable operation, low noise, and low electrical interference.

       

 

The pulse bias power supply is commonly used in electrical arc ion plating, DC magnetron sputtering, magnetron sputtering ion plating, unbalanced magnetron sputtering, and twin magnetron sputtering systems for substrate bias during film deposition.

 

The main features of these power inverters include: glow discharge substrate surface cleaning, ion bombardment during thin film deposition, substrate surface temperature control and so on. Using proper biasing parameters, one not only can avoid surface arcing to increase products yield but also can enhance surface smoothness and thin film/substrate adhesion.  When using pulsed biasing, the arcing energy can be restrained during  glow discharge and thin film deposition to ensure an excellent substrate surface without damage.  Besides, a higher bias voltage can be applied in the pulsed bias mode than that in the DC bias mode, and the substrate temperature can be controlled via the adjustment of the pulsing frequency and duty cycle.

 

Main characteristics

  1. Advanced switching technology with small footprint, stable operation, low noise, and low electrical interference
  2. Auto current stabilizing function rednering stable operation under highly fluctuating electrical load
  3. Multiple circuit protection modes in the BP Series reducimg frequent arcing during operation and enabling continuous and stable operation under high-frequency arcing without circuit damage
  4. Multiple output modes on front panel facilitating flexible adjustment of the pulse bias, pulse duration, pulse frequency and so on

 

Main Specification 

  1. Output Duty Cycle:        10 - 80 %, continuously adjustable.
  2. Output Frequency:        40 kHz
  3. Power Input:                 Three phases 380 V + 10 %.

Model

Power

Working Voltage

Max. Working Current

Working Mode

Cooling Mode

Cabinet Dimension

BP-5

5kW

100-1000V

5A

CV

Wind

7U+

 

 

50-500V

10A

 

 

 

BP-10

10kW

100-1000V

10A

CV

Wind

7U+

 

 

50-500V

20A

 

 

 

BP-20

20kW

100-1000V

20A

CV

Water

1.2m cabinet

 

 

50-500V

40A

 

 

 

BP-30

30kW

100-1000V

30A

CV

Water

1.8m cabinet

 

 

50-500V

60A

 

 

 

BP-60

60kW

100-1000V

60A

CV

Water

1.8m double cabinet

 

 

50-500V

120A

 

 

 

BP-100

100kW

100-1000V

100A

CV

Water

2.2m double cabinet

 

 

50-500V

200A

 

 

 

CV: Constant Voltage;

Optional: Remote control by PLC

Cabinet Dimension Table

Item Number

Cabinet Model

Body Dimension (mm)

Front Panel Dimension (mm)

Front Panel Holder

Back Panel Port

1

6U

W435xH270xD560

W480xH290

50mm

100mm

2

7U

W435xH315xD550

W480xH345

50mm

100mm

3

7U+

W435xH315xD705

W480xH345

50mm

100mm

Item Number

Cabinet Model

Body Dimension (mm)

Body Dimension with Uplift Holders and Wheels (mm)

Backdoor

1

1.2m

W600xH1220xD700

W600xH1255xD700

Single Door Opening

2

1.6m

W600xH1620xD800

W600xH1720xD800

Single Door Opening

3

1.8m

W600xH1800xD800

W600xH1890xD800

Single Door Opening

4

2.0m

W600xH2060xD800

W600xH2150xD800

Single Door Opening

Item Number

Cabinet Model

Body Dimension (mm)

Body Dimension with Uplift Holders and Wheels (mm)

Front and Backdoor

1

 1.8m double cabinet

W1200xH1800xD1000

W1200xH1890xD1000

Double Door Opening

2

2.2m double cabinet 

W1200xH2200xD1000

W1200xH2250xD1000

Double Door Opening

3

2.0m triple cabinet

W1800xH2000xD1000

W1800xH2070xD1000

Triple Door Opening

 

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