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  Power Supplies >> RF Generator and Matching Network >> 500W RF Power Supply / RF Generator

500W RF Power Supply / RF Generator







Our solid-state design 13.56MHz RF generators provide state-of-the art technology of precise and repeatable power control, ultra-stable output and low cost of ownership. Coupled with our MN-5A Matching Networks, the power system performs extraordinarily well in plasma-based thin-film manufacturing processes.


The RF plasma generators can be used as source or bias generators for continuous operation or as stand-alone batch tools, and is ideally suited for applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs, MEMs and data storage devices.



Our RF generators are protected against excessive Voltage Standing Wave Ratio (VSWR) conditions by limiting reflected power, power amplifier current, and power amplifier transistor dissipation


Technical Specifications

Output Power




Forward Power Metering

+ /-1% Full Scale,  +/-1% Reading

Output Power Stability

+/0.5% Long Term, +/-1%Watt

Power Response Time


Output Impedance

50 Ohm




-50 dBc

Input Power

AC220V, 47-63 Hz, 10A

Output Connector

L16K, Type "N" Female

Interface Connectors

RS485, RS232

Display Content

Control Mode, Power Setting, Forward Power,

Reverse Power, Output Status, Fault Status


Over Heat, Over Voltage, Over Current, VSWR


Forced Air





Need help?

Contact an Applications Specialist by sending an Email to PTL or call 852-98814818.







For other related products:


1000W RF Generator


2000W RF Generator


5000W RF Generator


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