Plasma Technology Limited
  Home    About Us    News    Products   Honors     R & D     Divisions     Feedback   Service  
User Name:
Password:
Registration  Forget Pwd?
Vacuum Systems
Power Supplies
Plasma and Ion Sources
Sputtering Targets
Plasma Polishing
Online request
E-mail request

 
  Power Supplies >> RF Generator and Matching Network >> MN-5A RF Auto Matching Network
 

MN-5A RF Auto Matching Network

 

                                   

 

 

PTL versatile Auto Impedance Matching Networks provide efficient, accurate, reliable and quick matching across RF generators to precisely match the complex impedance of a plasma to a desired tuning range.

 

Parameters

PTL Automatic Matching Network

Traditional Manual Matching Controller

Core Devices

Vacuum Adjustable Capacitor

Air Adjustable Capacitor

Lifetime

More Than 10 Years

More Than 5 Years

Continuous Working Time

24 Hours

24 Hours

Power Stability

+/- 1%

+/- 5%

Safety

High Safety

Maybe Discharge if Under Humidity

Maneuver Ability

Adjusting Automatically

Take Time for Manual Adjusting

Matching Time

Less Than 3 Seconds

5 Minutes or More

Reflected Power

Less Than 5 Watts

Less Than 30 Watts

 

  

The installation of the matching network is virtually plug-and-play with our 300W RF power generator, 500W RF power generator, 600W RF power generator.

 

Equipped with microprocessor-controlled stepper motor drives and advanced fuzzy logic tuning algorithms, the matching network rapidly transforms plasma impedances to 50 ohms to maximize power transfer to the process chamber and provides greater consistency and accuracy than traditional analog-based tuning methods. The result is optimized RF power to semiconductor, solar, FPD, and MEMs manufacturing plasma processes, including etch, PVD, PECVD, HDPCVD, ALD and chamber clean applications.

 

Technical Specifications

Main Technical Properties

Model

MN-5A

Frequency

13.56MHz

Maximum Transmission Power

500W

Reflected Power (Under Maximum Positive Power Output)

< 5W

Input Impedance

50 Ohm

Automatic Matching Time

0.2 - 1 second

Auto/Manual Function

Yes

Range of the Matched Impedance

(2~45) Ohm - j(0~70) Ohm

Adjustable Capacitor

Adjustable Capacitor (1%-100%)

RF Input Connector

50 Ohm, N-type or UHF-type 

RF Output Connector

50 Ohm, N-type or UHF-type or Copper bar Output

Cooling Mode

Air Cooling

AC Power Supply

100-240VAC

AC Frequency

50/60 Hz

Weight

~8kg

Size

390*260*132.5(Length*Width*Height)mm

 

Download RF Products Brochure 

 

Need help?

Contact an Applications Specialist by sending an Email to PTL or call 852-98814818.


 

  Hits:1218  Input time:6/19/2021 【Print】 【Back
   
 
plasmatechnol.com
Sales Hotline: +852-98814818 Service Hotline: +852-69259880 E-mail: sales@plasmatechnol.com
Copyright©Plasma Technology Limited 1998-2024 All rights reserved