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  Plasma and Ion Sources >> Metal Vapor Vacuum Arc Source MEVVA
 

Metal Vapor Vacuum Arc Source MEVVA

                                 

Cathodic vacuum arcs produce highly ionized plasmas from virtually all solid metallic elements.  As long as a material is sufficiently conducting to serve as an arc cathode, it can be used in a cathodic arc discharge.  Therefore, not only metals and alloys  (i.e. Al, Ti, Cu, Cr, Zr, Zn, Au, Ag, Co, Ni, V, Y, Nb, rare earth metals, so on) but also semi-metals (graphite) and highly-doped semiconductors (Si, Ge) can be used to produce plasmas from which ions can be extracted.  Cathodic arc plasmas are characterized by the presence of multiple charged ions.  Ions formed in the plasma can be extracted and accelerated by the strong electric field between the extraction electrodes and ion implanted into any kind of substrate materials. The extracted ion energy can be from 10keV to over 150keV. 

The MEVVA source is operated in pulse mode and touch screen controlled.

       

 

Model

MEVVA50

Operation Control

Touch Screen + PLC

Arc Discharge Mode

Pulse

Cathode Dimension

Diameter F10mm x Length 30mm

Cathode Erosion Compensation

Auto Push, Manual Push and Manual Pull

Cathode Cooling

Oil

Triggering Voltage

~20kV

Arc Discharge Voltage

0V - 100V (Adjustable)

Pulse Arc Discharge Current

50A - 200A

Discharge Pulse Width

0.2ms - 1.5ms (Adjustable)

Pulsing Frequency

0 - 20Hz  (Adjustable)

Operation Pressure

1 x 10e-2 Pa or Below

Beam Size (Flange Size Dependent)

F100mm - F300mm

 

 

Ion Beam Extracted Current

1mA - 10mA

 

 

Output Ion Voltage Range

20kV-50kV

 

 

Process Control Mode

Ion Dose or Pulse Number

Protection

Fault and Failure Alarm

Emergency Stop

Grounding

Pneumatic Auto Grounding and Manual Grounding

1 Ohm or Below Grounding

Power Input

3-phase 380V+/-5%, 50/60Hz, 60A

 

Model

MEVVA80

Operation Control

Touch Screen + PLC

Arc Discharge Mode

Pulse

Cathode Dimension

Diameter F10mm x Length 30mm

Cathode Erosion Compensation

Auto Push, Manual Push and Manual Pull

Cathode Cooling

Oil

Triggering Voltage

~20kV

Arc Discharge Voltage

0 - 100V (Adjustable)

Pulse Arc Discharge Current

50A - 200A

Discharge Pulse Width

0.2ms - 1.5ms (Adjustable)

Pulsing Frequency

0 - 20Hz  (Adjustable)

Operation Pressure

1 x 10e-2 Pa or Below

Beam Size (Flange Size Dependent)

F100mm - F300mm

 

 

Ion Beam Extracted Current

1mA - 5mA

 

 

Output Ion Voltage Range

30kV-80kV

 

 

Process Control Mode

Ion Dose or Pulse Number

Protection

Fault and Failure Alarm

Emergency Stop

Grounding

Pneumatic Auto Grounding and Manual Grounding

1 Ohm or Below Grounding

Power Input

3-phase 380V+/-5%, 50/60Hz, 60A

 

 

  

               

        

    

 

Download  "Ion charge state and velocity datasheet"

 

For additional product information and pricing contact our specialists at sales@plasmatechnol.com.

 

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