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  | Plasma and Ion Sources >> Grided Gas Ion Source
 

Grided Gas Ion Source

 

                            

          

  • �Reactive gas compatible
  • �Ion beam etching and sputtering
  • �Ion beam assisted deposition
  • �In-situ ion beam pre-cleaning in a static processing system
  • �Direct deposition of thin films (e.g., DLC using hydrocarbon based gases)
  • �Industrial, low maintenance design 

                          

 
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